応力波を利用した多層膜の膜厚と膜物性の同時同定

Publication Information

Title

Japanese:	応力波を利用した多層膜の膜厚と膜物性の同時同定
English:	Identification of thickness and properties for multi-layered films by using stress wave

Author

Japanese:	天谷賢治, 青木繁, 工藤智.
English:	天谷賢治, 青木繁, 工藤智.

Language

Japanese

Journal/Book name

Japanese:	日本機械学会第14回計算力学講演会講演論文集
English:

Volume, Number, Page

No. 01-10 pp. 209-210

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: