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Publication Information
Title
Japanese:
応力波を利用した多層膜の膜厚と膜物性の同時同定
English:
Identification of thickness and properties for multi-layered films by using stress wave
Author
Japanese:
天谷賢治
, 青木 繁, 工藤 智.
English:
天谷賢治
, 青木 繁, 工藤 智.
Language
Japanese
Journal/Book name
Japanese:
日本機械学会第14回計算力学講演会講演論文集
English:
Volume, Number, Page
No. 01-10 pp. 209-210
Published date
2001
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.