GHz Interconnect in ULSI

Publication Information

Title

Japanese:
English:	GHz Interconnect in ULSI

Author

Japanese:	K. Masu, K. Tsubouchi.
English:	K. Masu, K. Tsubouchi.

Language

English

Journal/Book name

Japanese:
English:	Joint Workshop of 29th IUVSTA International Workshop and 2nd International Workshop on Development of Thin Films for Future ULSI’s and Nano-Scale Proces

Volume, Number, Page

pp. 310-313

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: