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Title
Japanese:電子ビーム励起プラズマ援用PVD法によるDLC合成 
English: 
Author
Japanese: 田淵公一, 比田井洋史, 戸倉和, 平田敦.  
English: Kouichi Tabuchi, Hirofumi Hidai, Hitoshi Tokura, Atsuhi Hirata.  
Language Japanese 
Journal/Book name
Japanese:2002年度精密工学会春期大会学術講演論文集 
English: 
Volume, Number, Page         pp. 301
Published date 2002 
Publisher
Japanese: 
English: 
Conference name
Japanese:精密工学会春期大会 
English: 
Conference site
Japanese:東京都目黒区 
English: 
Official URL http://ci.nii.ac.jp/naid/10008500382
 

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