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Publication Information
Title
Japanese:
電子ビーム励起プラズマ援用PVD法によるDLC合成
English:
Author
Japanese:
田淵公一,
比田井洋史
,
戸倉和
,
平田敦
.
English:
Kouichi Tabuchi,
Hirofumi Hidai
,
Hitoshi Tokura
,
Atsuhi Hirata
.
Language
Japanese
Journal/Book name
Japanese:
2002年度精密工学会春期大会学術講演論文集
English:
Volume, Number, Page
pp. 301
Published date
2002
Publisher
Japanese:
English:
Conference name
Japanese:
精密工学会春期大会
English:
Conference site
Japanese:
東京都目黒区
English:
Official URL
http://ci.nii.ac.jp/naid/10008500382
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Tokyo Institute of Technology All rights reserved.