Home >

news Help

Publication Information


Title
Japanese:基板加振式プラズマエッチングの研究(第2報) - 加振性能の向上によるエッチレートの改善 
English: 
Author
Japanese: 初澤毅, 廣沢稔, 早瀬仁則.  
English: 初澤毅, 廣沢稔, 早瀬仁則.  
Language Japanese 
Journal/Book name
Japanese:精密工学会誌 
English: 
Volume, Number, Page Vol. 67    No. 10    pp. 1687-1692
Published date 2001 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

©2007 Tokyo Institute of Technology All rights reserved.