Dependence of Ti Surface Nitriding Degree by Nitrogen Plasma Irradiation on Plasma Parameters

Publication Information

Title

Japanese:
English:	Dependence of Ti Surface Nitriding Degree by Nitrogen Plasma Irradiation on Plasma Parameters

Author

Japanese:	H. Kobori, S. Watanabe, S. Koike, M. Matsuzaki, H. Matsuura, H. Akatsuka.
English:	H. Kobori, S. Watanabe, S. Koike, M. Matsuzaki, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Bull. Am. Phys. Soc.

Volume, Number, Page

Vol. 47 No. 7 pp. 19

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: