Diagnostics of Surface Wave Nitrogen Discharge Generated by Slot Antenna Plasma Source

Publication Information

Title

Japanese:
English:	Diagnostics of Surface Wave Nitrogen Discharge Generated by Slot Antenna Plasma Source

Author

Japanese:	R. Toyoyoshi, T. Sakamoto, H. Matsuura, H. Akatsuka.
English:	R. Toyoyoshi, T. Sakamoto, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Bull. Am. Phys. Soc.

Volume, Number, Page

Vol. 47 No. 7 pp. 51

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: