Hydrothermally deposited PZT film and its application to bending vibration devices

Publication Information

Title

Japanese:
English:	Hydrothermally deposited PZT film and its application to bending vibration devices

Author

Japanese:	保井秀彦, 黒澤実, 樋口俊郎.
English:	H. Yasui, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A: Physical

Volume, Number, Page

Vol. 96 No. 1 pp. 28-33

Published date

Jan. 2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI