Electrical Characteristics of Rare Earth Gate Oxides Improved by Chemical Oxide and Long Low Temperature Annealing

Publication Information

Title

Japanese:
English:	Electrical Characteristics of Rare Earth Gate Oxides Improved by Chemical Oxide and Long Low Temperature Annealing

Author

Japanese:	S.Ohmi, I.Kashiwagi, C.Ohshima, J.Taguchi, H.Yamamoto, J.Tonotani, H.Ishiwara, H.Iwai.
English:	S.Ohmi, I.Kashiwagi, C.Ohshima, J.Taguchi, H.Yamamoto, J.Tonotani, H.Ishiwara, H.Iwai.

Language

English

Journal/Book name

Japanese:
English:	Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials

Volume, Number, Page

pp. 718-719

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: