Al-CVD Technology using MPA [methylpyrrolidine alane]

Publication Information

Title

Japanese:
English:	Al-CVD Technology using MPA [methylpyrrolidine alane]

Author

Japanese:	K. Masu, M. Sakamoto, J. I. Lee, K. Furuta, M. Hatanaka, M. Ishikawa, Y. Takahashi, Y. Furumura.
English:	K. Masu, M. Sakamoto, J. I. Lee, K. Furuta, M. Hatanaka, M. Ishikawa, Y. Takahashi, Y. Furumura.

Language

English

Journal/Book name

Japanese:
English:	Advanced Metallization Conference 2002: 12th Asian Session

Volume, Number, Page

pp. 52-53

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: