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Publication Information
Title
Japanese:
English:
X-ray evaluation of microroughness of mechano chemically pollishid silicon surfaces
Author
Japanese:
坂田修身
.
English:
OSAMI SAKATA
.
Language
English
Journal/Book name
Japanese:
English:
Jpn. J. Appl. Phys
Volume, Number, Page
Vol. 32 pp. 616-619
Published date
1993
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.