X-ray evaluation of microroughness of mechano chemically pollishid silicon surfaces | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	X-ray evaluation of microroughness of mechano chemically pollishid silicon surfaces

Author

Japanese:	坂田修身　.
English:	OSAMI SAKATA.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys

Volume, Number, Page

Vol. 32 pp. 616-619

Published date

1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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