Determination of microroughness of polished Si (100) surfaces by X-ray reflectivity measurements | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Determination of microroughness of polished Si (100) surfaces by X-ray reflectivity measurements

Author

Japanese:	坂田修身　.
English:	OSAMI SAKATA.

Language

English

Journal/Book name

Japanese:
English:	Report RLEMTIT

Volume, Number, Page

Vol. 18 pp. 25-37

Published date

1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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