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Title
Japanese:高誘電率希土類酸化物薄膜のSi基板表面処理の効果 
English: 
Author
Japanese: 吉原義昭, 大島千鶴, 大見俊一郎, 岩井洋.  
English: 吉原義昭, 大島千鶴, 大見俊一郎, 岩井洋.  
Language Japanese 
Journal/Book name
Japanese:第63回応用物理学会学術講演会 講演予稿集 
English: 
Volume, Number, Page Vol. 2        pp. 735
Published date 2002 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
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