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Title
Japanese:最先端ＣＭＯＳデバイス・プロセス技術 
English: 
Author
Japanese: 大見俊一郎.  
English: SHUN-ICHIRO OHMI.  
Language Japanese 
Journal/Book name
Japanese:第99回電子デバイス技術委員会 
English: 
Volume, Number, Page        
Published date 2002 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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