Stability of High-k Thin Films in Moisture Ambience - The effect of Dissolution Gas from Acryl Apparatus -

Publication Information

Title

Japanese:
English:	Stability of High-k Thin Films in Moisture Ambience - The effect of Dissolution Gas from Acryl Apparatus -

Author

Japanese:	Sadahiro Akama, Akira Kikuchi, Junichi Tonotani, Shun-ichiro Ohmi, Hiroshi Iwai.
English:	Sadahiro Akama, Akira Kikuchi, Junichi Tonotani, Shun-ichiro Ohmi, Hiroshi Iwai.

Language

English

Journal/Book name

Japanese:
English:	32nd European Solid-State Device Research Conference

Volume, Number, Page

pp. 587-590

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: