Characteristics of High-k Gd<sub>2</sub>O<sub>3</sub> films deposited on different orientation of Si substrate

Publication Information

Title

Japanese:
English:	Characteristics of High-k Gd₂O₃ films deposited on different orientation of Si substrate

Author

Japanese:	I. Kashiwagi, C. Ohshima, S.-I. Ohmi, H. Iwai.
English:	I. Kashiwagi, C. Ohshima, S.-I. Ohmi, H. Iwai.

Language

English

Journal/Book name

Japanese:
English:	202nd meeting of The Electrochemical Society

Volume, Number, Page

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: