High-k Gate Insulator Endurance against Moisture Ambience and Wet Process

Publication Information

Title

Japanese:
English:	High-k Gate Insulator Endurance against Moisture Ambience and Wet Process

Author

Japanese:	A. Kikuchi, S. Akama, S. Ohmi, K. Tsutsui, H. Iwai.
English:	A. Kikuchi, S. Akama, S. Ohmi, K. Tsutsui, H. Iwai.

Language

English

Journal/Book name

Japanese:
English:	WORKSHOP ON MICROELECTRONICS AND ELECTRON DEVICES (μE-ED 2002)

Volume, Number, Page

pp. 13-14

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: