Chemical and Electronic Structures of Lu<sub>2</sub>O<sub>3</sub>/Si Interfacial Transition Layer

Publication Information

Title

Japanese:
English:	Chemical and Electronic Structures of Lu₂O₃/Si Interfacial Transition Layer

Author

Japanese:	H. Nohira, T. Shiraishi, T. Nakamura, K. Takahashi, M. Takeda, S. Ohmi, H. Iwai, T. Hattori.
English:	H. Nohira, T. Shiraishi, T. Nakamura, K. Takahashi, M. Takeda, S. Ohmi, H. Iwai, T. Hattori.

Language

English

Journal/Book name

Japanese:
English:	Fourth International Symposium on Control of Semiconductor Interfaces

Volume, Number, Page

pp. P4-5

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: