Dependence of Nitriding Degree of Ti Surface by non-LTE Nitrogen Plasma on Various Plasma Parameters

Publication Information

Title

Japanese:
English:	Dependence of Nitriding Degree of Ti Surface by non-LTE Nitrogen Plasma on Various Plasma Parameters

Author

Japanese:	H. Kobori, S. Koike, S. Watanabe, M. Matsuzaki, H. Matsuura, H. Akatsuka.
English:	H. Kobori, S. Koike, S. Watanabe, M. Matsuzaki, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Extended Abstracts of the 16th Symposium on Plasma Science for Materials

Volume, Number, Page

pp. 74

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: