Mechanical vibration assisted plasma etching for etch rate and anisotropy improvement

Publication Information

Title

Japanese:
English:	Mechanical vibration assisted plasma etching for etch rate and anisotropy improvement

Author

Japanese:	Hatsuzawa Takeshi, Hayase Masanori, Oguchi Toshiaki.
English:	Hatsuzawa Takeshi, Hayase Masanori, Oguchi Toshiaki.

Language

English

Journal/Book name

Japanese:
English:	Precision Engineering

Volume, Number, Page

Vol. 26 No. 4 pp. 442

Published date

Apr. 2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI