Preparation of Carbon Related Thin Films Using Atmospheric Non-thermal Plasma Jet

Publication Information

Title

Japanese:
English:	Preparation of Carbon Related Thin Films Using Atmospheric Non-thermal Plasma Jet

Author

Japanese:	T.Miura, H.Sekiguchi.
English:	T.Miura, H.Sekiguchi.

Language

English

Journal/Book name

Japanese:
English:	Abst. of The 8th IUMRS Int. Conf. Advanced Materials

Volume, Number, Page

Vol. 2 pp. 210

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: