On-Chip Variable Inductor Using MEMS Technology

Publication Information

Title

Japanese:
English:	On-Chip Variable Inductor Using MEMS Technology

Author

Japanese:	Y. Yokoyama, T. Fukushige, S. Hata, K. Masu, A. Shimokohbe.
English:	Y. Yokoyama, T. Fukushige, S. Hata, K. Masu, A. Shimokohbe.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys

Volume, Number, Page

Vol. 42 No. 4B pp. 2190-2192

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: