Characterization of Lu<sub>2</sub>O<sub>3</sub> Thin Films Fabricated by E-beam Deposition Method

Publication Information

Title

Japanese:
English:	Characterization of Lu₂O₃ Thin Films Fabricated by E-beam Deposition Method

Author

Japanese:	S. Ohmi, M. Takeda, H. Ishiwara, H. Iwai.
English:	S. Ohmi, M. Takeda, H. Ishiwara, H. Iwai.

Language

English

Journal/Book name

Japanese:
English:	J. Electrochem. Soc.

Volume, Number, Page

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: