Dependence of gas Temperature of Oxygen Plasma on Discharge Conditions

Publication Information

Title

Japanese:
English:	Dependence of gas Temperature of Oxygen Plasma on Discharge Conditions

Author

Japanese:	K. Naoi, T. Sakamoto, H. Matsuura, H. Akatsuka.
English:	K. Naoi, T. Sakamoto, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Bull. Am. Phys. Soc.

Volume, Number, Page

Vol. 48 No. 6 pp. 31

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: