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Title
Japanese:「次世代エレクトロニクス薄膜技術」 第６章コンビナトリアルテクノロジー-集積化薄膜技術による材料開発の革新 
English: 
Author
Japanese: 松本祐司, 鯉沼秀臣.  
English: 松本祐司, 鯉沼秀臣.  
Language Japanese 
Journal/Book name
Japanese:株式会社シーエムシー出版 
English: 
Volume, Number, Page         pp. 120?144
Published date 2003 
Publisher
Japanese:株式会社シーエムシー出版 
English: 
Conference name
Japanese: 
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Conference site
Japanese: 
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