Effect of gas phase absorption into Si substrates on plasma doping process

Publication Information

Title

Japanese:
English:	Effect of gas phase absorption into Si substrates on plasma doping process

Author

Japanese:	Ryota Higaki, 筒井一生, Yuichiro Sasaki, Sadahiro Akama, Bunji Mizuno, 大見俊一郎, 岩井洋.
English:	Ryota Higaki, Kazuo Tsutsui, Yuichiro Sasaki, Sadahiro Akama, Bunji Mizuno, Shun-ichiro OHMI, HIROSHI IWAI.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 231-234

Published date

Sept. 2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:	33rd European Solid-State Device Research Conference (ESSDERC2003)

Conference site

Japanese:
English:	Estoril

Abstract

pp.231-234