Stepping Motion Analysis of Surface Acoustic Wave Motor toward Nanometer Resolution Positioning System

Publication Information

Title

Japanese:
English:	Stepping Motion Analysis of Surface Acoustic Wave Motor toward Nanometer Resolution Positioning System

Author

Japanese:	重松隆史, 黒澤実, 浅井勝彦.
English:	T. Shigematsu, M. K. Kurosawa, K. Asai.

Language

English

Journal/Book name

Japanese:
English:	Proc. of IEEE Ultrasonic Symp.

Volume, Number, Page

pp. 531-536

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: