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Title
Japanese:ECRスパッタ法により形成したAlOxNy薄膜の電気特性に対する熱処理の効果 
English: 
Author
Japanese: 山中剛, 佐々木大輔, 大見俊一郎, 酒井徹志.  
English: 山中剛, 佐々木大輔, 大見俊一郎, 酒井徹志.  
Language Japanese 
Journal/Book name
Japanese:第50回応用物理学関係連合講演会 講演予稿集 
English: 
Volume, Number, Page Vol. 2        pp. 893
Published date 2003 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
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