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Publication Information
Title
Japanese:
ECRスパッタ法により形成したAlO
x
N
y
薄膜の電気特性に対する熱処理の効果
English:
Author
Japanese:
山中剛, 佐々木大輔,
大見俊一郎
, 酒井徹志.
English:
山中剛, 佐々木大輔,
大見俊一郎
, 酒井徹志.
Language
Japanese
Journal/Book name
Japanese:
第50回応用物理学関係連合講演会 講演予稿集
English:
Volume, Number, Page
Vol. 2 pp. 893
Published date
2003
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.