Effect of Vacuum Annealing on High-k Dy<sub>2</sub>O<sub>3</sub> Thin Films Deposited on Si(100)

Publication Information

Title

Japanese:
English:	Effect of Vacuum Annealing on High-k Dy₂O₃ Thin Films Deposited on Si(100)

Author

Japanese:	S. Ohmi, H. Yamamoto, J. Taguchi, K. Tsutsui, H. Iwai.
English:	S. Ohmi, H. Yamamoto, J. Taguchi, K. Tsutsui, H. Iwai.

Language

English

Journal/Book name

Japanese:
English:	Ext. Abst. of the 2003 Intenational Conference on Solid State Devices and Materials

Volume, Number, Page

pp. 510-511

Published date

Sept. 2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Tokyo, Japan