Plasma Diagnostics in Plasma Processing for nanotechnology and Nano-level Chemistry

Publication Information

Title

Japanese:
English:	Plasma Diagnostics in Plasma Processing for nanotechnology and Nano-level Chemistry

Author

Japanese:	赤塚洋.
English:	HIROSHI AKATSUKA.

Language

English

Journal/Book name

Japanese:
English:	Proc. Nanoscience and Nanotechnology on Quantum Particles 2003 (NNQP2003)

Volume, Number, Page

pp. 15

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: