マイクロ波励起酸素プラズマに対する希ガスの混入効果

Publication Information

Title

Japanese:	マイクロ波励起酸素プラズマに対する希ガスの混入効果
English:	Effect of Admixture of Rare Gases on Microwave-Excited Oxygen Plasma

Author

Japanese:	直井浩一, 坂本武士, 北村直久, 松浦治明, 赤塚　洋.
English:	直井浩一, 坂本武士, 北村直久, 松浦治明, 赤塚　洋.

Language

Japanese

Journal/Book name

Japanese:	2004年春季第51回応用物理学関係連合講演会予稿集
English:	Extended Abstracts (The 51st Spring Meeting, 2004); The Japan Society of Applied Physics and Related Societies

Volume, Number, Page

pp. 142

Published date

2004

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English:

Conference name

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Conference site

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