In-process microsensor for ultraprecision machining

Publication Information

Title

Japanese:
English:	In-process microsensor for ultraprecision machining

Author

Japanese:	H.Yoshioka, H.Hashizume, H.Shinno.
English:	H.Yoshioka, H.Hashizume, H.Shinno.

Language

English

Journal/Book name

Japanese:
English:	IEE Proceedings - Science, Measurement and Technology

Volume, Number, Page

Vol. 151 No. 2 pp. 121-125

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: