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Publication Information
Title
Japanese:
English:
In-process microsensor for ultraprecision machining
Author
Japanese:
H.Yoshioka
, H.Hashizume, H.Shinno.
English:
H.Yoshioka
, H.Hashizume, H.Shinno.
Language
English
Journal/Book name
Japanese:
English:
IEE Proceedings - Science, Measurement and Technology
Volume, Number, Page
Vol. 151 No. 2 pp. 121-125
Published date
2004
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.