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Title
Japanese:マイクロ波放電酸素プラズマの回転温度に関する希ガス混入の影響 
English: 
Author
Japanese: 直井浩一, 坂本武士, 北村直久, 松浦治明, 赤塚洋.  
English: 直井浩一, 坂本武士, 北村直久, 松浦治明, 赤塚洋.  
Language Japanese 
Journal/Book name
Japanese:平成１６年度日本分光学会春季講演会講演要旨集 
English: 
Volume, Number, Page         pp. 76
Published date 2004 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
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