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Publication Information
Title
Japanese:
English:
X-Y-θ Nano-Positioning Table System for a Mother Machine
Author
Japanese:
H.Shinno, H.Hashizume,
H.Yoshioka
, K.Komatsu, T.Shinshi, K.Sato.
English:
H.Shinno, H.Hashizume,
H.Yoshioka
, K.Komatsu, T.Shinshi, K.Sato.
Language
English
Journal/Book name
Japanese:
English:
Annals of the CIRP(Annals of the International Institution for Production Engineering Research)
Volume, Number, Page
Vol. 53 No. 1 pp. 337-340
Published date
2004
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.