X-Y-θ Nano-Positioning Table System for a Mother Machine

Publication Information

Title

Japanese:
English:	X-Y-θ Nano-Positioning Table System for a Mother Machine

Author

Japanese:	H.Shinno, H.Hashizume, H.Yoshioka, K.Komatsu, T.Shinshi, K.Sato.
English:	H.Shinno, H.Hashizume, H.Yoshioka, K.Komatsu, T.Shinshi, K.Sato.

Language

English

Journal/Book name

Japanese:
English:	Annals of the CIRP(Annals of the International Institution for Production Engineering Research)

Volume, Number, Page

Vol. 53 No. 1 pp. 337-340

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: