Dependence of Nitriding Degree of Ti Surface by Non-LTE Nitrogen Plasma on Various Plasma Parameters

Publication Information

Title

Japanese:
English:	Dependence of Nitriding Degree of Ti Surface by Non-LTE Nitrogen Plasma on Various Plasma Parameters

Author

Japanese:	H. Kobori, S. Koike, S. Watanabe, M. Matsuzaki, H. Matsuura, H. Akatsuka.
English:	H. Kobori, S. Koike, S. Watanabe, M. Matsuzaki, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 457 pp. 69

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: