Effect of Admixture of Rare Gases on Microwave Excited Oxygen Plasma

Publication Information

Title

Japanese:
English:	Effect of Admixture of Rare Gases on Microwave Excited Oxygen Plasma

Author

Japanese:	T. Sakamoto, K. Naoi, N. Kitamura, H. Matsuura, H. Akatsuka.
English:	T. Sakamoto, K. Naoi, N. Kitamura, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Bull. Am. Phys. soc.

Volume, Number, Page

Vol. 49 No. 5 pp. 32

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: