大気圧マイクロ波放電酸素プラズマの分光診断

Publication Information

Title

Japanese:	大気圧マイクロ波放電酸素プラズマの分光診断
English:	Spectroscopic Diagnostics of Microwave Discharge Oxygen Plasma of Atmospheric Pressure

Author

Japanese:	赤塚洋.
English:	赤塚洋.

Language

Japanese

Journal/Book name

Japanese:	静電気学会誌
English:	J. Inst. Electrostatics Jpn.

Volume, Number, Page

Vol. 28 No. 5 pp. 244

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: