Impact of Latent Image Quality on Line Edge Roughness in Electron Beam Lithography

Publication Information

Title

Japanese:
English:	Impact of Latent Image Quality on Line Edge Roughness in Electron Beam Lithography

Author

Japanese:	Masaki Yoshizawa, Shigeru Moriya, Hiroyuki Nakano, Yuichi Shirai, Tatsuo Morita, Tetsuya Kitagawa, Yasuyuki Miyamoto.
English:	Masaki Yoshizawa, Shigeru Moriya, Hiroyuki Nakano, Yuichi Shirai, Tatsuo Morita, Tetsuya Kitagawa, Yasuyuki Miyamoto.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 43 No. 6B pp. 3739

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: