Photoluminescence assessment of B, P and Al in Si wafers: The problem of the sample heating by a laser beam

Publication Information

Title

Japanese:
English:	Photoluminescence assessment of B, P and Al in Si wafers: The problem of the sample heating by a laser beam

Author

Japanese:	I. Pelant, J. Dian, J. Matouskova, J. Valenta, J. Hala, M. Ambroz, M. Vacha, V. Kohlova, K. Vojtechovsky, K. Kaslik.
English:	I. Pelant, J. Dian, J. Matouskova, J. Valenta, J. Hala, M. Ambroz, M. Vacha, V. Kohlova, K. Vojtechovsky, K. Kaslik.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

Vol. 73 pp. 3477-3481

Published date

1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: