Fabrication of Fe-C soft magnetic thin films by facing-targets sputtering method

Publication Information

Title

Japanese:
English:	Fabrication of Fe-C soft magnetic thin films by facing-targets sputtering method

Author

Japanese:	Yoshitaka Kitamoto, Hiroyuki Tagami, Kyung-Ku Choi, Yohtaro Yamazaki.
English:	Yoshitaka Kitamoto, Hiroyuki Tagami, Kyung-Ku Choi, Yohtaro Yamazaki.

Language

English

Journal/Book name

Japanese:
English:	5th International Symposium on Electrochemical Micro & Nnano System Technologies

Volume, Number, Page

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: