DLC coating for mechanical seals by sputtering in argon and methane plasma

Publication Information

Title

Japanese:
English:	DLC coating for mechanical seals by sputtering in argon and methane plasma

Author

Japanese:	Hamed Vaez Taghavi, 平田敦.
English:	Hamed Vaez Taghavi, Atsushi Hirta.

Language

English

Journal/Book name

Japanese:
English:	Abstract book of the 9th International Conference on New Diamond Science and Technology

Volume, Number, Page

pp. 195-196

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: