High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks

Publication Information

Title

Japanese:
English:	High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks

Author

Japanese:	初澤毅, 濱野尚, 斉藤匡史, 栁田保子.
English:	T. Hatsuzawa, H. Hamano, M. Saito, Y. Yanagida.

Language

English

Journal/Book name

Japanese:
English:	IEEJ Trans. on Sensor and Micromachines

Volume, Number, Page

Vol. 127 No. 1 pp. 37-41

Published date

Jan. 2007

Publisher

Japanese:	電気学会
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI