A newly developed linear motor-driven ultrasonic levitation nano-positioning table system

Publication Information

Title

Japanese:
English:	A newly developed linear motor-driven ultrasonic levitation nano-positioning table system

Author

Japanese:	吉岡勇人, Takahashi. M., Gokan. T., 新野秀憲.
English:	Yoshioka, H., Takahashi. M., Gokan. T., Shinno, H..

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 7th euspen International Conference

Volume, Number, Page

Vol. II pp. 145-148

Published date

May 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	7th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen)

Conference site

Japanese:
English:	Bremen, Germany