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Title
Japanese:ダイレクトボンディングにおけるO2プラズマ表面処理の光導波路への影響 
English: 
Author
Japanese: 櫻井, 齊藤, 武井, 水本.  
English: 櫻井, 齊藤, 武井, Tetsuya MIZUMOTO.  
Language Japanese 
Journal/Book name
Japanese:応用物理学会 
English: 
Volume, Number, Page         pp. 31a-ZQ-7
Published date Mar. 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese:2005年春季第52回応用物理学関係連合講演会 
English: 
Conference site
Japanese:埼玉 
English: 

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