Fabrication of SIL Array of Glass by Surface-Tension Mold Technique | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Fabrication of SIL Array of Glass by Surface-Tension Mold Technique

Author

Japanese:	岸哲生, 柴田修一, 矢野哲司.
English:	Tetsuo Kishi, Shuichi Shibata, Tetsuji Yano.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of SPIE

Volume, Number, Page

Vol. 6126 pp. 6120P

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI

http://dx.doi.org/10.1117/12.647317

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