Visualization of Micro-scale Polymer Melt Filling during Hot Embossing Lithography Process

Publication Information

Title

Japanese:
English:	Visualization of Micro-scale Polymer Melt Filling during Hot Embossing Lithography Process

Author

Japanese:	Takushi Saito, Tatsuya Kawaguchi, Isao Satoh.
English:	Takushi Saito, Tatsuya Kawaguchi, Isao Satoh.

Language

English

Journal/Book name

Japanese:
English:	CD-ROM Proceedings of Polymer Processing Society 22th Annual Meeting

Volume, Number, Page

pp. SP5-08.pdf

Published date

July 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Polymer Processing Society 22th Annual Meeting

Conference site

Japanese:
English:	山形