マイクロプラズマを使ったシリコンナノ粒子の気相合成

Publication Information

Title

Japanese:	マイクロプラズマを使ったシリコンナノ粒子の気相合成
English:	Synthesis of silicon nanocrystals in microplasma reactor

Author

Japanese:	野崎智洋, 佐々木健二, 荻野智久, 朝日大介, 岡崎健.
English:	Tomohiro Nozaki, Kenji Sasaki, Tomohisa Ogino, Daisuke Asahi, Ken Okazaki.

Language

Japanese

Journal/Book name

Japanese:
English:	Thermal Science and Engineering

Volume, Number, Page

Vol. 14 No. 4 pp. 75-81

Published date

Dec. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: