In-Situ Gas-Phase FTIR Monitoring of Liquid Delivery MOCVD Process for PZT Films Preparation

Publication Information

Title

Japanese:
English:	In-Situ Gas-Phase FTIR Monitoring of Liquid Delivery MOCVD Process for PZT Films Preparation

Author

Japanese:	舟窪浩, Gouji Asano, Kazuaki Tonari, Yukichi Takamatsu, Kunio Ohtsuki, Tsukasa Satake.
English:	Hiroshi Funakubo, Gouji Asano, Kazuaki Tonari, Yukichi Takamatsu, Kunio Ohtsuki, Tsukasa Satake.

Language

English

Journal/Book name

Japanese:
English:	Process Intensification and Innovation Process (PI)2 Conference II Cleaner, Sustainable, Efficient Technologies for the Future

Volume, Number, Page

p. 51.

Published date

Sept. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Process Intensification and Innovation Process (PI)2 Conference II Cleaner, Sustainable, Efficient Technologies for the Future

Conference site

Japanese:
English:	Chateau on the Park, Christchurch, New Zealand