Study of xenon capillary Z pinch extreme-ultraviolet light source for lithography

Publication Information

Title

Japanese:
English:	Study of xenon capillary Z pinch extreme-ultraviolet light source for lithography

Author

Japanese:	Keita Kitade, Inho Song, Mitsuo Okamoto, Yasushi Hayashi, Majid Masnavi, Masato Watanabe, Akitoshi Okino, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta.
English:	Keita Kitade, Inho Song, Mitsuo Okamoto, Yasushi Hayashi, Majid Masnavi, Masato Watanabe, Akitoshi Okino, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	NIFS-PROC

Volume, Number, Page

Vol. 62 pp. 16-23

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: