PULSE OPERATED MULTI-GAS INDUCTIVELY COUPLED PLASMA SOURCE

Publication Information

Title

Japanese:
English:	PULSE OPERATED MULTI-GAS INDUCTIVELY COUPLED PLASMA SOURCE

Author

Japanese:	A. Okino, H. Miyahara, K. Takimoto, T. Kageyasu, M. Watanabe E. Hotta.
English:	A. Okino, H. Miyahara, K. Takimoto, T. Kageyasu, M. Watanabe E. Hotta.

Language

English

Journal/Book name

Japanese:
English:	2006 IEEE International Conference on Plasma Science

Volume, Number, Page

pp. 153

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2006 IEEE International Conference on Plasma Science

Conference site

Japanese:
English:	USA