CHARACTERISTICS OF GAS JET Z-PINCH PLASAM SOURCE FOR EXTREME ULTRAVIOLET LITHOGRAPHY

Publication Information

Title

Japanese:
English:	CHARACTERISTICS OF GAS JET Z-PINCH PLASAM SOURCE FOR EXTREME ULTRAVIOLET LITHOGRAPHY

Author

Japanese:	M. Watanabe, I. Song, T. Sakamoto, Y. Kobayashi, N. Iizuka, N. Kishi, A. Okino, S.R. Mohanty, E. Hotta.
English:	M. Watanabe, I. Song, T. Sakamoto, Y. Kobayashi, N. Iizuka, N. Kishi, A. Okino, S.R. Mohanty, E. Hotta.

Language

English

Journal/Book name

Japanese:
English:	2006 IEEE International Conference on Plasma Science

Volume, Number, Page

pp. 313

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2006 IEEE International Conference on Plasma Science

Conference site

Japanese:
English:	USA